Plasma-Therm is an established leading provider of advanced plasma processing equipment with more than 35 years of focus on customer support, innovation, reliability and low cost of ownership.

Plasma-Therm's ICP, RIE and DSE plasma etch and PECVD and HDPCVD thin film deposition systems are used both in R&D and high volume production in applications for solid state lighting, wireless, MEMS, data storage, renewable energy, nanotechnology, photomask and photonics.

The flexibility and modularity of Plasma-Therm's flagship product, the VERSALINE, has made it a cost efficient platform for a wide range of applications. Our Mask Etcher series of systems for photomask production is a cornerstone for the integrated circuit industry by exceeding technology roadmap milestones for over 15 years.